The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Aug. 21, 2019
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Kuan-Yuan Shen, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 27/11582 (2017.01); H01L 27/11578 (2017.01); H01L 23/528 (2006.01); H01L 27/11551 (2017.01); H01L 27/11514 (2017.01);
U.S. Cl.
CPC ...
H01L 21/76831 (2013.01); H01L 21/76802 (2013.01); H01L 23/5283 (2013.01); H01L 27/11578 (2013.01); H01L 27/11582 (2013.01); H01L 27/11514 (2013.01); H01L 27/11551 (2013.01);
Abstract

Provided is a memory device, including a stacked structure, a pillar, a first stop layer, and a contact plug. The stacked structure includes a plurality of conductive layers. The pillar penetrates the plurality of series-connected memory cells. The plurality of series-connected memory cells are located in a layout pattern of pillar locations at cross-points between the pillar and the conductive layers. The first stop layer covers the stacked structure and a portion of a top surface of the pillar. The contact plug passes through the first stop layer, extending into the pillar, and is electrically connected to the plurality of series-connected memory cells. The contact is landed on the contact plug, and is electrically connected to a portion of the pillar through the contact plug.


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