The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Jun. 24, 2016
Applicant:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Inventors:
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/38 (2006.01); C08F 214/18 (2006.01); C08F 216/10 (2006.01); C08F 220/24 (2006.01); C08F 220/28 (2006.01); C08F 220/38 (2006.01); C08F 220/68 (2006.01); C08F 222/18 (2006.01); C08F 222/20 (2006.01); C08F 222/24 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C08F 214/186 (2013.01); C08F 216/10 (2013.01); C08F 220/24 (2013.01); C08F 220/282 (2020.02); C08F 220/283 (2020.02); C08F 220/382 (2020.02); C08F 220/68 (2013.01); C08F 222/18 (2013.01); C08F 222/20 (2013.01); C08F 222/24 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/2041 (2013.01); G03F 7/38 (2013.01);
Abstract
A resist composition which contains a resin (A1) which has a structural unit having a sulfonyl group, a structural unit represented by formula (II) and a structural unit having an acid-labile group, and an acid generator: wherein Rrepresents a hydrogen atom, a halogen atom or a Cto Calkyl group that may have a halogen atom, Lrepresents a single bond or *-L-CO—O-(L-CO—O)— where * represents a binding position to an oxygen atom, Land Lindependently represent a Cto Cdivalent hydrocarbon group, 'g' represents 0 or 1, and Rrepresents a Cto Cliner or branched alkyl group except for a tertiary alkyl group.