The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2020
Filed:
Feb. 24, 2020
Asml Netherlands B.v., Veldhoven, NL;
Jesse Quinn Odle, San Diego, CA (US);
Vahan Senekerimyan, Kirkland, WA (US);
Cèsar Fernandez-Espasa, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A moving property of a target is measured as the target travels toward a target space. The target including a component that emits light when converted to a plasma. A diagnostic probe system is interacted with a current target moving toward the target space. The interaction occurs prior to the current target entering the target space and after an immediately preceding target has interacted with a prior radiation pulse in the target space. First and second light that is produced at least in part from the interaction between the diagnostic probe system and the current target is detected prior to the current target entering the target space and after an immediately preceding target has interacted with the prior radiation pulse in the target space. One or more moving properties of the current target are determined based on an analysis of the detected first and second light.