The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2020

Filed:

Oct. 29, 2015
Applicant:

Toray Engineering Co., Ltd., Chuo-ku, Tokyo, JP;

Inventors:

Masamichi Yamashita, Otsu, JP;

Takayoshi Fujimoto, Kusatsu, JP;

Masaki Mori, Yasu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); H01L 31/048 (2014.01); B32B 7/02 (2019.01); C23C 16/455 (2006.01); H01L 31/0392 (2006.01); C23C 16/02 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); B32B 7/02 (2013.01); C23C 16/0272 (2013.01); C23C 16/45523 (2013.01); C23C 16/545 (2013.01); H01L 31/03926 (2013.01); H01L 31/048 (2013.01); Y02E 10/50 (2013.01);
Abstract

A method for forming a sealing film, in which a buffer layer and a barrier layer whose density is higher than that of the buffer layer are alternately formed on a substrate, includes forming a first buffer layer on a surface of the substrate, forming a first barrier layer on a surface of the first buffer layer, and forming a second buffer layer on a surface of the first barrier layer. A ratio of a thickness of a portion of the first buffer layer in a thickness direction of the substrate relative to a thickness of a portion of the first buffer layer in an inclined direction that is inclined with respect to the thickness direction is closer to 1 than a ratio of a thickness of a portion of the second buffer layer in the thickness direction relative to a thickness of a portion of the second buffer layer in the inclined direction.


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