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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10790177 B1

PDFFull Text
Date of Patent:
Sep. 29, 2020

Filed:

Feb. 27, 2018

Systems, devices, and methods for using a real time environment sensor in a foup

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Po Shun Lin, Taichung, TW;

Zhi Long Huang, Taichung, TW;

Kung Chieh Cheng, Taichung, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;

Attorney:

Haynes and Boone, LLP

Primary Examiner:

Clayton E LaBalle

Assistant Examiner:

Kevin C Butler

Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/67 (2006.01); G01N 25/68 (2006.01); G05D 22/02 (2006.01); G01F 1/74 (2006.01); G01N 25/56 (2006.01); G01N 25/60 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); G01F 1/74 (2013.01); G01N 25/56 (2013.01); G01N 25/60 (2013.01); G01N 25/68 (2013.01); G05D 22/02 (2013.01); H01L 21/67253 (2013.01); H01L 21/67389 (2013.01);
Abstract

The present disclosure provides systems and methods for monitoring an environment of a front opening universal pod (FOUP). The systems and methods may include one or more environmental sensors disposed within the FOUP, configured to measure environmental parameters of the environment of the FOUP and a FOUP configured to hold one or more wafers. The systems and methods may also include a wireless transmitter in communication with the environmental sensor, which may be disposed within the FOUP and configured to transmit the measured environmental parameters from the environmental sensor.

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Lin, Po. (2020). Systems, devices, and methods for using a real time environment sensor in a foup (U.S. Patent No. 10790177). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10790177

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