The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Feb. 20, 2019
Zhongke Jingyuan Electron Limited, Beijing, CN;
Zhaoli Zhang, Beijing, CN;
Weimin Ma, Beijing, CN;
Kangkang Yang, Beijing, CN;
Yan Zhao, Beijing, CN;
Zhongke Jingyuan Electron Limited, Beijing, CN;
Abstract
Methods, apparatuses, and systems for image-based abnormality detection for periodic patterns are provided. The method includes receiving an image pattern T determined from an inspection image, wherein T comprises multiple periodic segments along a spatial direction; determining, by a processor, a first reference pattern R1 by rearranging the multiple periodic segments of T in a first manner and a second reference pattern R2 by rearranging the multiple periodic segments of T in a second manner; determining whether an abnormality exists in T by comparing a part of T with a part of R1 and a part of R2; and determining that the abnormality exists in T based on a determination that the part of T is different from the part of R1 and the part of R2.