The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Jan. 06, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Ralf Hofmann, Soquel, CA (US);
Cara Beasley, Scotts Valley, CA (US);
Majeed Foad, Sunnyvale, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); G03F 1/22 (2012.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
G03F 1/22 (2013.01); C23C 14/50 (2013.01); C23C 16/4583 (2013.01); G03F 7/16 (2013.01); H01J 37/32715 (2013.01); H01J 37/32899 (2013.01); H01J 37/3405 (2013.01); H01J 37/3417 (2013.01); H01J 37/3447 (2013.01);
Abstract
A processing system includes: a vacuum chamber; a plurality of processing sub-systems attached around the vacuum chamber; and a wafer handling system in the vacuum chamber for moving the wafer among the plurality of processing systems without exiting from a vacuum. A physical vapor deposition system for manufacturing an extreme ultraviolet blank comprising: a target comprising molybdenum, molybdenum alloy, or a combination thereof.