The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Jun. 29, 2017
Applicant:
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Inventors:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD., Shanghai, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1337 (2006.01); G02F 1/13 (2006.01);
U.S. Cl.
CPC ...
G02F 1/133788 (2013.01); G02F 1/1303 (2013.01); G02F 1/1337 (2013.01);
Abstract
A photo-alignment control method and a photo-alignment apparatus are disclosed. In the photo-alignment control method, a yaw angle of a motion stage () relative to a polarizing illumination device () is detected to derive a weighted dynamic polarization angle deviation of a substrate (), so that a rotational angle of a rotary table () for rotating a substrate () is controlled, thereby effectively improving a control accuracy of a polarization angle in the photo-alignment process and further to ensure an accuracy of an alignment angle formed in an alignment film.