The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2020

Filed:

Oct. 18, 2017
Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventors:

Yu-Hsuan Ho, Taichung, TW;

Ming-Chih Tsai, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/14 (2006.01); H01L 29/41 (2006.01); G01J 5/04 (2006.01); G01J 5/20 (2006.01); G01J 1/42 (2006.01); G01J 5/10 (2006.01); G01N 27/12 (2006.01); G01J 5/22 (2006.01); G01N 27/04 (2006.01);
U.S. Cl.
CPC ...
G01R 27/14 (2013.01); G01J 1/429 (2013.01); G01J 5/046 (2013.01); G01J 5/10 (2013.01); G01J 5/20 (2013.01); H01L 29/41 (2013.01); G01J 5/22 (2013.01); G01N 27/041 (2013.01); G01N 27/121 (2013.01); G01N 27/128 (2013.01);
Abstract

A resistive environmental sensor including an electrode stack and a sensing layer is provided. The electrode stack includes a first electrode layer, a second electrode layer, and a dielectric layer disposed between the first and second electrode layers, wherein the electrode stack includes a side surface, and the first and second electrode layers are exposed on the side surface of the electrode stack. The sensing layer is disposed on the side surface of the electrode stack, and the sensing layer s in contact with the first and second electrode layers. An environmental variation is inspected by sensing a resistance variation of the sensing layer that is between the first and second electrode layers. The above-mentioned sensor is capable of sensing gases, light, humidity, temperature, and so on. The above-mentioned sensor has advantages of low resistivity and good sensitivity.


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