The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2020
Filed:
Feb. 05, 2019
Tokyo Electron Limited, Tokyo, JP;
Kohei Otsuki, Miyagi, JP;
Akiyoshi Mitsumori, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A processing systemincludes a heat insulating pipe, a temperature measuring device, and a control device. The heat insulating pipehas an inner pipe and an outer pipe. An airtight space is formed between the inner pipe and the outer pipe. A fluid having a temperature lower than that of an indoor space in which the heat insulating pipeis placed is flown within the inner pipe. The temperature measuring devicemeasures a temperature of a surface of the heat insulating pipe. The control deviceis controls a pressure within the airtight space by controlling an exhaust deviceconfigured to exhaust a gas within the airtight space based on the temperature of the surface of the heat insulating pipeand a dew-point temperature calculated from a humidity and the temperature of the indoor space.