The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Jul. 11, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Jeremy Nesbitt, San Jose, CA (US);
Joshua Knight, Napa, CA (US);
Timothy Russin, San Jose, CA (US);
Vadim Palshin, Castro Valley, CA (US);
Suneet Luniya, Santa Clara, CA (US);
Kevin Lai, Milpitas, CA (US);
Mike Murugan, Fremont, CA (US);
Mark Bailey, Roseville, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An inspection system may include an optical component configured to deliver inspection light to a subject and a detector configured to obtain an image of the subject based on the inspection light delivered to the subject. The inspection system may also include a processor in communication with the optical component and the detector. The processor may be configured to: measure an aberration of the optical component based on the image of the subject obtained by the detector; and adjust the optical component to compensate for a change in the aberration.