The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Mar. 25, 2019
Applicant:

Excelliance Mos Corporation, Hsinchu County, TW;

Inventors:

Chu-Kuang Liu, Hsinchu County, TW;

Hung-Kun Yang, Hsinchu County, TW;

Assignee:

Excelliance MOS Corporation, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 29/10 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0607 (2013.01); H01L 29/10 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/7787 (2013.01);
Abstract

A gate structure for gallium nitride (GaN) high electron mobility transistor (HEMT) includes a heterogeneous structure, a doped GaN layer, an insulating layer, an undoped GaN layer, and a gate metal layer. The heterogeneous structure includes a channel layer and a barrier layer on the channel layer. The doped GaN layer is disposed on the barrier layer, the insulating layer is disposed on both sides of the top portion of the doped GaN layer, and the undoped GaN layer is disposed between the doped GaN layer and the insulating layer. The gate metal layer is disposed on the doped GaN layer and covers the insulating layer and the undoped GaN layer. The undoped GaN layer can protect the underlying doped GaN layer, and the insulating layer has the effect of preventing gate leakage.


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