The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Nov. 03, 2016
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Alexander Petrus Josephus Van Lankvelt, Veghel, NL;
Olav Johannes Seijger, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03F 7/20 (2006.01); F03G 3/06 (2006.01); F16F 7/10 (2006.01); F16F 15/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/709 (2013.01); F03G 3/06 (2013.01); F16F 7/1022 (2013.01); F16F 15/04 (2013.01); G03F 7/70716 (2013.01); G03F 7/70758 (2013.01); G03F 7/70766 (2013.01); G03F 7/70808 (2013.01); G03F 7/70816 (2013.01); G03F 7/70833 (2013.01); F16F 2228/063 (2013.01); F16F 2228/066 (2013.01);
Abstract
The invention provides a vibration isolation device configured to support a structure, comprising: an air mount having a base part mounted on a reference structure and a vibration isolated part, and an inverted pendulum device, wherein a lower end of the inverted pendulum device is mounted on the vibration isolated part of the air mount and an upper end of the inverted pendulum device support the structure to be supported, wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.