The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Nov. 20, 2017
Si-ware Systems, Cairo, EG;
Bassam Saadany, Cairo, EG;
Mostafa Medhat, Cairo, EG;
Muhammad Nagi, Cairo, EG;
Ahmed Shebl, Cairo, EG;
Yasser M. Sabry, Cairo, EG;
Bassem Mortada, Cairo, EG;
Diaa Khalil, Cairo, EG;
SI-WARE SYSTEMS, Cairo, EG;
Abstract
Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.