The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 22, 2020

Filed:

Jun. 26, 2014
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Masao Kawamura, Tokyo, JP;

Toshikatsu Sudo, Tokyo, JP;

Atsushi Shinboya, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/50 (2006.01); C23C 14/32 (2006.01); B23P 15/28 (2006.01); C23C 14/02 (2006.01); C23C 14/56 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/325 (2013.01); B23P 15/28 (2013.01); C23C 14/022 (2013.01); C23C 14/50 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/568 (2013.01);
Abstract

A deposition apparatus for cutting tools with a coating film capable of depositing the coating film in an appropriate temperature condition is provided. The deposition apparatus includes: a deposition chamber in which a coating film is formed on the cutting tools; a pre-treatment chamber and post-treatment chamber, each of which is connected to the deposition chamber through a vacuum valve; and a conveying line that conveys the cutting tools from the pre-treatment chamber to the post-treatment chamber going through the deposition chamber, the in-line deposition apparatus using a conveyed carrier on which rods supporting cutting tools are provided in a standing state along a conveying direction. The deposition chamber includes: a deposition region; a conveying apparatus; a heating region; and a carrier-waiting region.


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