The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Mar. 13, 2018
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Hiroshi Morikazu, Tokyo, JP;
Noboru Takeda, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/0622 (2014.01); B23K 26/00 (2014.01); H01L 21/78 (2006.01); B23K 26/06 (2014.01); B23K 37/04 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0622 (2015.10); B23K 26/0006 (2013.01); B23K 26/0604 (2013.01); B23K 37/0461 (2013.01); H01L 21/78 (2013.01);
Abstract
Disclosed herein is a laser processing method including a first application step of applying a first laser beam having a pulse width shorter than time of electron excitation generated by application of a laser beam to a workpiece, and a second application step of applying a second laser beam within the electron excitation time.