The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2020

Filed:

Jul. 09, 2018
Applicant:

International Business Machines Corporation;

Inventors:

Sampath Purushothaman, Armonk, NY (US);

Roy Rongqing Yu, Armonk, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 27/06 (2006.01); H01L 27/12 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/762 (2006.01); H01L 21/84 (2006.01); H01L 23/544 (2006.01); H01L 25/00 (2006.01); H01L 29/06 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76897 (2013.01); H01L 21/304 (2013.01); H01L 21/30604 (2013.01); H01L 21/7684 (2013.01); H01L 21/76251 (2013.01); H01L 21/76256 (2013.01); H01L 21/76802 (2013.01); H01L 21/76805 (2013.01); H01L 21/76879 (2013.01); H01L 21/76898 (2013.01); H01L 21/84 (2013.01); H01L 23/5226 (2013.01); H01L 23/544 (2013.01); H01L 24/03 (2013.01); H01L 24/81 (2013.01); H01L 24/89 (2013.01); H01L 24/92 (2013.01); H01L 24/94 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 27/0688 (2013.01); H01L 27/1203 (2013.01); H01L 27/1207 (2013.01); H01L 29/0649 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 2221/68372 (2013.01); H01L 2223/54426 (2013.01); H01L 2224/03 (2013.01); H01L 2224/03002 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05548 (2013.01); H01L 2224/05567 (2013.01); H01L 2224/11002 (2013.01); H01L 2224/1148 (2013.01); H01L 2224/11616 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13007 (2013.01); H01L 2224/13022 (2013.01); H01L 2224/13024 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/17181 (2013.01); H01L 2224/8013 (2013.01); H01L 2224/81005 (2013.01); H01L 2224/8109 (2013.01); H01L 2224/81065 (2013.01); H01L 2224/81075 (2013.01); H01L 2224/81093 (2013.01); H01L 2224/81193 (2013.01); H01L 2224/81201 (2013.01); H01L 2224/81209 (2013.01); H01L 2224/9202 (2013.01); H01L 2224/94 (2013.01); H01L 2225/06548 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/14 (2013.01); H01L 2924/1433 (2013.01); H01L 2924/1461 (2013.01);
Abstract

An article of manufacture is formed by preparing a first silicon-on-insulator (SOI) wafer with first bonding pads at a first top or back-end-of-line (BEOL) surface thereof, preparing a second SOI wafer with second bonding pads at a second BEOL surface thereof, and attaching the first and second SOI wafers by bonding their bonding pads together, thereby producing a sandwiched wafer with first and second bottom or front-end-of-line (FEOL) surfaces facing outward and with first and second BEOL surfaces facing each other near the midline of the sandwiched wafer. The first SOI wafer then is prepared for packaging by first removing the silicon substrate from the first FEOL surface to reveal a buried oxide (BOX) layer, then fabricating interconnects atop the BOX layer and forming input output pads atop the interconnects.


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