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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10770298 B1

PDFFull Text
Date of Patent:
Sep. 08, 2020

Filed:

Aug. 17, 2016

Automatic inspection device and method of laser processing equipment

Applicant:

Eo Technics Co., Ltd., Anyang-si, Gyeonggi-do, KR;

Inventors:

Hak Yong Lee, Seoul, KR;

Sang Young Park, Seoul, KR;

Nack Hoon Kim, Anyang-si, KR;

Ho Chul Choi, Seoul, KR;

Assignee:

EO TECHNICS CO., LTD., Gyeonggi-Do, KR;

Attorney:

Buchanan Ingersoll & Rooney PC

Primary Examiner:

Thanh Y Tran

Int. Cl.
CPC ...
H01L 21/268 (2006.01); B23K 31/12 (2006.01); B23K 26/0622 (2014.01); B23K 26/082 (2014.01); B23K 26/53 (2014.01); H01L 21/66 (2006.01); B23K 26/00 (2014.01); B23K 26/064 (2014.01); B23K 26/03 (2006.01); B23K 26/362 (2014.01); B23K 26/40 (2014.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/268 (2013.01); B23K 26/0006 (2013.01); B23K 26/032 (2013.01); B23K 26/064 (2015.10); B23K 26/0622 (2015.10); B23K 26/0624 (2015.10); B23K 26/082 (2015.10); B23K 26/362 (2013.01); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B23K 31/125 (2013.01); H01L 22/12 (2013.01); H01L 22/24 (2013.01); H01L 22/30 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08);
Abstract

Provided is an automatic inspection device and method for inspecting processing quality of laser processing equipment that forms a modified area by irradiating a laser beam into an object to be processed. The automatic inspection device includes: an image film coated on a bottom surface of the object to be processed; an image sensing unit configured to detect a damage image of the object to be processed formed on the image film through irradiation of the laser beam; and an image processing unit configured to process the damage image detected by the image sensing unit.

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