The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Dec. 14, 2017
Applicant:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Inventors:
Larry G. Nelson, Sr., Webster, MA (US);
Klaus Petry, Merrimac, MA (US);
Assignee:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/24 (2006.01); H01J 37/248 (2006.01); G21K 5/04 (2006.01); G01R 19/165 (2006.01); G01R 31/12 (2020.01); G01R 19/17 (2006.01);
U.S. Cl.
CPC ...
H01J 37/241 (2013.01); G21K 5/04 (2013.01); H01J 37/243 (2013.01); H01J 37/248 (2013.01); G01R 19/16576 (2013.01); G01R 19/17 (2013.01); G01R 31/1227 (2013.01); H01J 2237/0206 (2013.01);
Abstract
A system and method for monitoring glitch frequency and energy is disclosed. The system includes a glitch capture module that monitors the voltage of a biased component and captures any glitches that occur. The glitch capture module also extends the duration of that glitch so that the controller is guaranteed to observe this glitch. In certain embodiments, the glitch capture module captures the maximum energy of the glitch by storing the minimum voltage, in terms of magnitude, of the glitch.