The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Mar. 22, 2017
Mitutoyo Corporation, Kanagawa-ken, JP;
Scott Allen Harsila, Shoreline, WA (US);
Mitutoyo Corporation, Kanagawa-ken, JP;
Abstract
A modulation monitoring system is disclosed for use with an imaging system that includes a variable focal length (VFL) lens, an objective lens, a camera, and a VFL lens controller which is configured to control the VFL lens to periodically modulate its optical power and thereby periodically modulate a focus position of the imaging system over a plurality of Z heights along a Z height direction. The modulation monitoring system comprises a VFL-traversing light source, comprising a light source configured to provide VFL-traversing light along a modulation monitoring light path through the VFL lens, and a modulation signal determining portion comprising an optical detector configured to receive the VFL-traversing light, and to provide at least one optical detector signal that corresponds to the modulated optical power of the VFL lens. The modulation monitoring portion outputs a least one modulation monitoring signal based on the at least one optical detector signal.