The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Dec. 23, 2016
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Euan Ramsay, Dublin, CA (US);

Theodore R. Lundquist, Milpitas, CA (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G01J 5/00 (2006.01); G01R 31/311 (2006.01); H02S 50/15 (2014.01); G01N 25/72 (2006.01);
U.S. Cl.
CPC ...
G01R 31/308 (2013.01); G01J 5/0096 (2013.01); G01N 25/72 (2013.01); G01R 31/311 (2013.01); H02S 50/15 (2014.12);
Abstract

Systems, methods, and computer readable media to improve the operation of thermographic imaging systems are described. Techniques are disclosed for generating thermograms using single low-noise photon detectors. More particularly, an array of single low-noise photon detectors operating in the Geiger mode may be used to accurately identify the time delay between the application of a periodic power stimulus to a device under test and the generation of photons resulting from that stimulus. In one embodiment an array of single photon detectors may be used to time-tag each detected photon. Thereafter, a high-speed counting circuit can correlate the detected photons to the applied stimulus. When operating at the frequencies possible in the Geiger mode, such measurements permit a higher degree of spatial resolution (e.g., in the x, y and z axes) of thermal hot-spots within the device under test than prior art approaches.


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