The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Feb. 26, 2016
Applicants:

Semilab Semiconductor Physics Laboratory Co., Ltd., Budapest, HU;

Sung-li Wang, Hsin-Chu, TW;

Lin-jung Wu, Hsin-Chu, TW;

Shyh-shin Ferng, Hsin-Chu, TW;

Yi-hung Lin, Hsin-Chu, TW;

Sheng-shin Lin, Hsin-Chu, TW;

Inventors:

Dmitriy Marinskiy, Tampa, FL (US);

Thye Chong Loy, Chubei, TW;

Jacek Lagowski, Tampa, FL (US);

Sung-Li Wang, Hsin-Chu, TW;

Lin-Jung Wu, Hsin-Chu, TW;

Shyh-Shin Ferng, Hsin-Chu, TW;

Yi-Hung Lin, Hsin-Chu, TW;

Sheng-Shin Lin, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/26 (2020.01); H01L 21/66 (2006.01); G01R 31/265 (2006.01); G01R 31/28 (2006.01); G01N 17/00 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); G01R 31/2621 (2013.01); G01R 31/2623 (2013.01); G01R 31/2625 (2013.01); G01R 31/2626 (2013.01); G01R 31/2628 (2013.01); G01R 31/2656 (2013.01); G01R 31/2831 (2013.01); G01N 17/00 (2013.01);
Abstract

An example semiconductor wafer includes a semiconductor layer, a dielectric layer disposed on the semiconductor layer, and a layer of the metal disposed on the dielectric layer. An example method of determining an effective work function of a metal on the semiconductor wafer includes determining a surface barrier voltage of the semiconductor wafer, and determining a metal effective work function of the semiconductor wafer based, at least in part, on the surface barrier voltage.


Find Patent Forward Citations

Loading…