The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Mar. 08, 2018
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Francisco Javier Santos Rodriguez, Villach, AT;
Roland Rupp, Lauf, DE;
Ronny Kern, Finkenstein, AT;
Josef Unterweger, Annenheim, AT;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B23B 31/30 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); H01L 21/6838 (2013.01); B23B 31/307 (2013.01); B23Q 2703/04 (2013.01);
Abstract
A wafer carrier comprises a first foil, a second foil, and a chamber between the first and the second foil. The first foil has a perforation and is used for carrying the wafer. The first and the second foil are connected to each other so as to form the chamber. The chamber is configured to be evacuated to form a vacuum in the chamber, the vacuum causes an underpressure at the perforation, the underpressure forms a carrying force to the wafer to be carried.