The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
May. 23, 2019
Utechzone Co., Ltd., New Taipei, TW;
UTECHZONE CO., LTD., New Taipei, TW;
Abstract
A semiconductor defects inspection apparatus for inspection of bubble defects of an object is provided. The semiconductor defects inspection apparatus includes a carrier, an optical system, an infrared image capturing device, and a processing unit. The carrier is adapted for bearing the object. The optical system provides an illumination beam to the object to produce an image beam. The infrared image capturing device is disposed on a transmission path of the image beam. The infrared image capturing device is adapted for receiving the image beam to be transformed into an image information. The processing unit is electrically connected to the infrared image capturing device and adapted for analyzing the object according to the image information.