The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Jan. 17, 2018
Asml Holding N.v., Veldhoven, NL;
Enrico Zordan, Norwalk, CT (US);
Brandon Adam Evans, Norwalk, CT (US);
Daniel Nathan Burbank, Ridgefield, CT (US);
Ankur Ramesh Baheti, Stamford, CT (US);
Samir A. Nayfeh, Dunn Loring, VA (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
Systems and methods are disclosed that provide a support system in the Z direction for patterning devices that can function under high acceleration and deceleration with minimal effect on travel and hysteresis in the X and Y directions. A reticle clamping system includes a support device and a holding device. The holding device is configured to releasably couple a reticle to the support device. The holding device includes a plurality of burls. The reticle clamping system further includes a metallic support system coupled to the support device. The metallic support system provides a vacuum path from a vacuum channel to the holding device.