The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Aug. 31, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Hauf, Ulm, DE;
Yanko Sarov, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/08 (2006.01); G02B 19/00 (2006.01); G01C 9/06 (2006.01); H02N 1/00 (2006.01); G01D 5/241 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/085 (2013.01); G01C 9/06 (2013.01); G01D 5/2412 (2013.01); G02B 19/0023 (2013.01); G02B 19/0095 (2013.01); G02B 26/0841 (2013.01); G02B 26/101 (2013.01); G02B 26/105 (2013.01); G03F 7/702 (2013.01); H02N 1/008 (2013.01);
Abstract
A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.