The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Jan. 23, 2019
Applicant:
Fujimi Incorporated, Kiyosu-shi, JP;
Inventors:
Shuhei Takahashi, Kiyosu, JP;
Masatoshi Tomatsu, Kiyosu, JP;
Assignee:
FUJIMI INCORPORATED, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01); C09G 1/02 (2006.01); H01L 21/02 (2006.01); B24B 37/04 (2012.01); H01L 21/304 (2006.01); B24B 1/00 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C09K 3/1409 (2013.01); B24B 1/00 (2013.01); B24B 37/042 (2013.01); B24B 37/044 (2013.01); C09G 1/02 (2013.01); C09K 3/1463 (2013.01); H01L 21/02024 (2013.01); H01L 21/304 (2013.01); H01L 29/1608 (2013.01);
Abstract
Provided is a method for polishing a material having a Vickers hardness of 1500 Hv or higher. The polishing method comprises a step of carrying out preliminary polishing using a preliminary polishing composition that comprises an abrasive Aand a step of carrying out final polishing using a final polishing composition that comprises an abrasive Alower in hardness than the abrasive A.