The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Nov. 16, 2016
Applicant:

Mitsui Chemicals, Inc., Minato-ku, Tokyo, JP;

Inventors:

Yasuhisa Kayaba, Urayasu, JP;

Hirofumi Tanaka, Tsukuba, JP;

Hiroko Wachi, Chiba, JP;

Shoko Ono, Kawasaki, JP;

Assignee:

MITSUI CHEMICALS, INC., Minato-Ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 177/06 (2006.01); C08G 73/02 (2006.01); C08G 73/10 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); C08G 69/42 (2006.01); H01L 23/29 (2006.01); C08K 5/092 (2006.01); C08K 3/28 (2006.01); C08K 5/09 (2006.01);
U.S. Cl.
CPC ...
C09D 177/06 (2013.01); C08G 69/42 (2013.01); C08G 73/0293 (2013.01); C08G 73/1003 (2013.01); H01L 21/02118 (2013.01); H01L 21/02142 (2013.01); H01L 21/02203 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01); H01L 21/02343 (2013.01); H01L 21/3105 (2013.01); H01L 23/296 (2013.01); C08K 3/28 (2013.01); C08K 5/09 (2013.01); C08K 5/092 (2013.01);
Abstract

A composition for forming a film for semiconductor devices including: a compound (A) including a cationic functional group containing at least one of a primary nitrogen atom or a secondary nitrogen atom and having a weight average molecular weight of from 10,000 to 400,000; a crosslinking agent (B) which includes the three or more —C(═O)OX groups (X is a hydrogen atom or an alkyl group having from 1 to 6 carbon atoms) in the molecule, in which from one to six of three or more —C(═O)OX groups are —C(═O)OH groups, and which has a weight average molecular weight of from 200 to 600; and water (D), in which the compound (A) is an aliphatic amine.


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