The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Jul. 11, 2019
Globalfoundries Inc., Grand Cayman, KY;
Abu Naser M. Zainuddin, Clifton Park, NY (US);
Wei Ma, Clifton Park, NY (US);
Daniel Jaeger, Saratoga Springs, NY (US);
Joseph Versaggi, Galway, NY (US);
Jae Gon Lee, Waterford, NY (US);
Thomas Kauerauf, Malta, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
One illustrative method disclosed herein includes forming 1st and 2nd sacrificial gate structures for, respectively, 1st and 2nd devices, removing 1st and 2nd sacrificial gate electrodes from the 1st and 2nd sacrificial gate structures so as to at least partially define, respectively, 1st and 2nd replacement gate (RMG) cavities, and removing the 2nd sacrificial gate insulation layer from the 2nd RMG cavity while leaving the 1st sacrificial gate insulation layer in position in the 1st RMG cavity. The method also includes forming a conformal gate insulation layer in both the 1st and 2nd RMG cavities, removing the conformal gate insulation layer and the 1st sacrificial gate insulation layer from the 1st RMG cavity while leaving the conformal gate insulation layer in the 2nd RMG cavity, and performing an oxidation process to form an interfacial gate insulation layer only in the 1st RMG cavity.