The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2020

Filed:

Sep. 26, 2017
Applicant:

Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;

Inventor:

Guodong Cong, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03F 7/20 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70975 (2013.01); G03F 7/70716 (2013.01); G03F 7/70733 (2013.01); G03F 7/70758 (2013.01); H01L 21/0274 (2013.01);
Abstract

A device for moving a workpiece platform is provided, comprising a bottom frame () for supporting the workpiece platform, a pneumatic spring () disposed on a lower surface of the bottom frame (), an air cushion unit () for generating flotation to support the workpiece platform when the workpiece platform is being moved, and a moving unit () disposed on the bottom frame (). The moving unit () comprises: a roller unit (), for driving the workpiece platform to move; a leaf spring (), wherein one end of the leaf spring () is connected to a connecting block (), and the other end thereof is connected to the roller unit (); and a leaf spring deformation drive unit (), connected to the leaf spring (), to enable, by driving the leaf spring () to deform, the roller unit () to be in contact with the ground when the workpiece platform is being moved. The leaf spring deformation drive unit () is disposed such that the leaf spring () deforms, and the roller unit () is in contact with the ground when the workpiece platform is being moved in or out, driving the workpiece platform to move, preventing jamming in case of extremely high torque, and improving stability when the workpiece platform is being moved.


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Cong, Guodong. (2020). Device for moving workpiece platform (U.S. Patent No. 10754263). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10754263

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