The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Nov. 16, 2016
Applicant:
Mitsui Chemicals, Inc., Minato-ku, Tokyo, JP;
Inventors:
Assignee:
MITSUI CHEMICALS, INC., Minatu-Ku, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 11/00 (2014.01); H01L 21/683 (2006.01); C09D 177/06 (2006.01); C08G 73/02 (2006.01); C08G 73/10 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); C08G 69/42 (2006.01); H01L 23/29 (2006.01); C08K 5/092 (2006.01); C08K 3/28 (2006.01); C08K 5/09 (2006.01);
U.S. Cl.
CPC ...
C09D 177/06 (2013.01); C08G 69/42 (2013.01); C08G 73/0293 (2013.01); C08G 73/1003 (2013.01); H01L 21/02118 (2013.01); H01L 21/02142 (2013.01); H01L 21/02203 (2013.01); H01L 21/02282 (2013.01); H01L 21/02318 (2013.01); H01L 21/02343 (2013.01); H01L 21/3105 (2013.01); H01L 23/296 (2013.01); C08K 3/28 (2013.01); C08K 5/09 (2013.01); C08K 5/092 (2013.01);
Abstract
Provided is a composition for forming a film for semiconductor devices, including: a compound (A) including a Si—O bond and a cationic functional group containing at least one of a primary nitrogen atom or a secondary nitrogen atom; a crosslinking agent (B) which includes three or more —C(═O)OX groups (X is a hydrogen atom or an alkyl group having from 1 to 6 carbon atoms) in the molecule, in which from one to six of three or more —C(═O)OX groups are —C(═O)OH groups, and which has a weight average molecular weight of from 200 to 600; and a polar solvent (D).