The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Feb. 22, 2018
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Shuichi Suemasa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24B 53/007 (2006.01); B08B 3/02 (2006.01); B08B 1/00 (2006.01); B08B 3/08 (2006.01); B08B 1/04 (2006.01);
U.S. Cl.
CPC ...
B08B 1/007 (2013.01); B08B 1/001 (2013.01); B08B 1/04 (2013.01); B08B 3/02 (2013.01); B08B 3/08 (2013.01); B24B 53/007 (2013.01); B24B 53/017 (2013.01);
Abstract
A self-cleaning device of the present disclosure includes: a cleaning member configured to clean a cleaning tool that cleans a substrate; and an injection unit configured to inject a liquid toward the cleaning member or the cleaning tool. The cleaning member has a cleaning surface that cleans the cleaning tool when the cleaning tool is pressed thereagainst, and the cleaning surface is inclined with respect to a horizontal plane.