The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Dec. 28, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jagan Rangarajan, San Jose, CA (US);
Gee Sun Hoey, San Jose, CA (US);
Jaimie Stomberg, Fremont, CA (US);
Ekaterina Mikhaylichenko, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/20 (2006.01); B05B 13/02 (2006.01); H01L 21/67 (2006.01); B08B 3/02 (2006.01); B08B 1/00 (2006.01); B05B 7/08 (2006.01); B05B 15/68 (2018.01);
U.S. Cl.
CPC ...
B05B 1/20 (2013.01); B05B 7/0846 (2013.01); B05B 7/0884 (2013.01); B05B 13/0278 (2013.01); B05B 15/68 (2018.02); B08B 1/002 (2013.01); B08B 3/02 (2013.01); H01L 21/67046 (2013.01); H01L 21/67051 (2013.01); B05B 13/0228 (2013.01);
Abstract
A spray manifold for a brush box is disclosed which includes an elongated body having a plurality of holes formed in a line along a direction parallel to a longitudinal axis of the body, a linear slot formed along a length of the body aligning with the line of the holes, a central bore formed along the length of the body and between each of the holes and the slot, and a cover disposed on the slot.