The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Sep. 27, 2018
International Business Machines Corporation, Armonk, NY (US);
Yann Mignot, Slingerlands, NY (US);
Alan Thomas, Hopewell Junction, NY (US);
Daniel Sanders, San Jose, CA (US);
Dario Goldfarb, Dobbs Ferry, NY (US);
Nelson Felix, Slingerlands, NY (US);
Chi-Chun Liu, Altamont, NY (US);
John Arnold, North Chatham, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An exemplary semiconductor wafer includes a lower sublayer of a first organic planarization layer (OPL) material; an upper sublayer of a second OPL material deposited onto the lower sublayer; and a detectable interface between the lower sublayer and the upper sublayer. The exemplary wafer is fabricated by depositing the lower sublayer; curing the lower sublayer; and after curing the lower sublayer, depositing the upper sublayer directly onto the lower sublayer.