The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Apr. 29, 2019
Tokyo Electron Limited, Tokyo, JP;
Kazushi Kaneko, Miyagi, JP;
Yukinori Hanada, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A microwave output device include: a microwave generation unit configured to generate a microwave, power of the microwave being pulse-modulated such that a pulse frequency, a duty ratio, a high level, and a low level respectively corresponding to a setting pulse frequency, a setting duty ratio, high level setting power, and low level setting power given from a controller; and an output unit configured to output a microwave propagating from the microwave generation unit, wherein the microwave generation unit alternately generates a microwave having a center frequency and a bandwidth respectively corresponding to a setting frequency and a setting bandwidth given from the controller and a microwave having a single frequency peak at a center frequency corresponding to a setting frequency given from the controller, in synchronization with switching between a high level and a low level of the power.