The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Nov. 06, 2017
International Business Machines Corporation, Armonk, NY (US);
Benjamin D. Briggs, Waterford, NY (US);
Lawrence A. Clevenger, LaGrangeville, NY (US);
Nicholas A. Lanzillo, Troy, NY (US);
Michael Rizzolo, Albany, NY (US);
Theodorus E. Standaert, Clifton Park, NY (US);
James H. Stathis, Poughquag, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
Embodiments of the invention are directed to a semiconductor wafer test system. A non-limiting example of the test system includes a controller, a sensing system communicatively coupled to the controller, and a stress source communicatively coupled to the controller. The controller is configured to control the stress source to deliver an applied stress to a targeted stress area of a semiconductor wafer. The sensing system is configured to detect the applied stress and provide data of the applied stress to the controller. The controller is further configured to control the stress source based at least in part on the data of the applied stress.