The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2020
Filed:
Mar. 18, 2019
Applicant:
Keyence Corporation, Osaka, JP;
Inventors:
Tsuyoshi Suenaga, Osaka, JP;
Masaki Fujiwara, Osaka, JP;
Assignee:
Keyence Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2513 (2013.01);
Abstract
A shape measuring device includes an optical-axis-direction driving section configured to minutely relatively displace a stage in an optical axis direction of a light receiving section with respect to a light projecting section and the light receiving section such that a phase of a projection pattern on the stage is shifted at a minute pitch finer than width of the phase of the projection pattern projected on the stage, the minute pitch being defined by controlling light projecting elements of a pattern generating section.