The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Aug. 14, 2018
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Michael Bernhardt, Boise, ID (US);

Tony Lindenberg, Boise, ID (US);

Wenzhe Zhang, Boise, ID (US);

Douglas Capson, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); G11C 13/00 (2006.01); C23F 3/00 (2006.01); H01L 27/24 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 45/06 (2013.01); C23F 3/00 (2013.01); G11C 13/003 (2013.01); G11C 13/0004 (2013.01); G11C 13/004 (2013.01); G11C 13/0007 (2013.01); G11C 13/0026 (2013.01); G11C 13/0028 (2013.01); G11C 13/0069 (2013.01); H01L 23/528 (2013.01); H01L 27/2409 (2013.01); H01L 27/2481 (2013.01); H01L 45/126 (2013.01); H01L 45/1233 (2013.01); H01L 45/1253 (2013.01); H01L 45/141 (2013.01); H01L 45/142 (2013.01); H01L 45/143 (2013.01); H01L 45/144 (2013.01); H01L 45/1608 (2013.01); H01L 45/1675 (2013.01); G11C 2013/005 (2013.01); G11C 2013/0045 (2013.01); G11C 2013/0078 (2013.01); G11C 2213/71 (2013.01); H01L 27/2418 (2013.01); H01L 27/2427 (2013.01);
Abstract

Methods, systems, and devices for memory arrays that use a conductive hard mask during formation and, in some cases, operation are described. A hard mask may be used to define features or components during the numerous material formation and removal steps used to create memory cells within a memory array. The hard mask may be an electrically conductive material, some or all of which may be retained during formation. A conductive line may be connected to each memory cell, and because the hard mask used in forming the cell may be conductive, the cell may be operable even if portions of the hard mask remain after formation.


Find Patent Forward Citations

Loading…