The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Jul. 13, 2018
Applicant:

The Board of Trustees of the University of Illinois, Urbana, IL (US);

Inventors:

Xiuling Li, Champaign, IL (US);

Jeong Dong Kim, Savoy, IL (US);

Munho Kim, Champaign, IL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0232 (2014.01); H01L 31/032 (2006.01); H01L 31/0236 (2006.01); H01L 31/0224 (2006.01); H01L 31/108 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02327 (2013.01); H01L 31/02363 (2013.01); H01L 31/022408 (2013.01); H01L 31/032 (2013.01); H01L 31/108 (2013.01);
Abstract

An optoelectronic device with an antireflective surface comprises a semiconductor substrate having a textured surface including a plurality of surface protrusions and/or indentations. A first electrode is in contact with the semiconductor substrate and spaced apart from a second electrode that is also in contact with the semiconductor substrate. The textured surface is fabricated by inverse metal-assisted chemical etching, and thus the semiconductor substrate is substantially devoid of ion-induced defects.


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