The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Aug. 22, 2019
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Miki, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An impedance matching method includes: calculating an output impedance of a theoretical circuit model set in advance from actual values of two variable components and a measured value of an input impedance; calculating values of the two variable components at the time of impedance matching through an arithmetic operation under a matching condition in the theoretical circuit model based on the calculated value of the output impedance assuming that the output impedance due to matching transition has the same value; and controlling the actual values of the variable components of the impedance matching device to correspond to the calculated two variable component values.