The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Apr. 12, 2019
Applicant:
Carl Zeiss Microscopy Gmbh, Jena, DE;
Inventors:
Josef Biberger, Wildenberg, DE;
Stefan Lengweiler, Oberkochen, DE;
Assignee:
Carl Zeiss Microscopy GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01); H01J 37/305 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3045 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 37/3056 (2013.01); H01J 37/317 (2013.01); H01J 2237/20278 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/31745 (2013.01);
Abstract
In a method for producing a TEM sample, an object is fastened to an element of an object holder such that a surface to be processed of the object is arranged substantially perpendicularly to an axis of rotation of the element. An ion beam is directed at the surface to be processed at grazing incidence, wherein the element adopts different rotational positions in relation to the axis of rotation, while the ion beam is directed at the surface to be processed.