The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Jul. 05, 2018
Gigaphoton Inc., Tochigi, JP;
Akiyoshi Suzuki, Oyama, JP;
Osamu Wakabayashi, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
The present invention allows more freely setting of the polarization direction of illumination light on an illumination surface of an exposure device. A beam transmission system () that transmits, to an exposure device (), a linearly polarized optical beam (L) output from a free electron laser device () includes: an optical beam splitting unit () configured to split the optical beam (L) into a first optical beam (L) and a second optical beam (L); and a first polarization direction rotating unit () configured to rotate the linear polarization direction of the first optical beam (L).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile