The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2020
Filed:
Mar. 08, 2019
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Tzi-Cheng Lai, San Jose, CA (US);
Jehn-Huar Chern, Morgan Hill, CA (US);
Stephen Biellak, Sunnyvale, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/148 (2006.01); H01L 27/146 (2006.01); H04B 3/32 (2006.01); H04N 5/357 (2011.01); G06F 1/10 (2006.01); H03L 7/081 (2006.01); H04N 5/376 (2011.01);
U.S. Cl.
CPC ...
H01L 27/14806 (2013.01); G06F 1/10 (2013.01); H01L 27/1464 (2013.01); H01L 27/14605 (2013.01); H01L 27/14609 (2013.01); H03L 7/0814 (2013.01); H04B 3/32 (2013.01); H04N 5/357 (2013.01); H04N 5/3765 (2013.01);
Abstract
An image sensor is provided that includes a pixel array divided into a plurality of pixel groups. Each pixel group is clocked by a respective plurality of horizontal-register clocks. Clock signals for the image sensor are adjusted. Adjusting the clock signals includes phase-shifting each plurality of horizontal-register clocks by a respective phase delay of a plurality of phase delays. The phase delays are evenly spaced and are spaced symmetrically about zero. With the clock signals adjusted, a target is imaged using the image sensor.