Integrated gate contact and cross-coupling contact formation

Abstract

Methods of forming cross-coupling contacts for field-effect transistors and structures for field effect-transistors that include cross-coupling contacts. A dielectric cap is formed over a gate structure and a sidewall spacer adjacent to a sidewall of the gate structure. A portion of the dielectric cap is removed from over the sidewall spacer and the gate structure to expose a first portion of the gate electrode of the gate structure at a top surface of the gate structure. The sidewall spacer is then recessed relative to the gate structure to expose a portion of the gate dielectric layer at the sidewall of the gate structure, which is removed to expose a second portion of the gate electrode of the gate structure. A cross-coupling contact is formed that connects the first and second portions of the gate electrode of the gate structure with an epitaxial semiconductor layer adjacent to the sidewall spacer.