The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Mar. 12, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Edric Tong, Sunnyvale, CA (US);
James Francis Mack, Woodside, CA (US);
Kin Pong Lo, Fremont, CA (US);
Errol Antonio C. Sanchez, Tracy, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Anzhong Chang, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments disclosed herein relate to a light pipe structure for thermal processing of semiconductor substrates. In one embodiment, a light pipe window structure for use in a thermal process chamber includes a transparent plate, and a plurality of light pipe structures formed in a transparent material that is coupled to the transparent plate, each of the plurality of light pipe structures comprising a reflective surface and having a longitudinal axis disposed in a substantially perpendicular relation to a plane of the transparent plate.