The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2020
Filed:
Mar. 02, 2018
Applicant:
Toshiba Memory Corporation, Minato-ku, Tokyo, JP;
Inventor:
Anupam Mitra, Yokohama Kanagawa, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/027 (2006.01); B29C 59/00 (2006.01); G03F 1/60 (2012.01); B29C 59/02 (2006.01); B29L 31/34 (2006.01); B29C 33/38 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 59/002 (2013.01); B29C 59/026 (2013.01); G03F 1/60 (2013.01); H01L 21/027 (2013.01); B29C 33/3842 (2013.01); B29L 2031/3406 (2013.01); H01L 21/3105 (2013.01);
Abstract
A template substrate includes a pedestal portion on a first surface of a substrate. The template substrate defines an opening region provided in a second surface opposite to the first surface of the substrate. The opening region includes an opening end on a second surface side of the opening region corresponding to the second surface and a bottom surface on a first surface side of the opening region corresponding to the first surface. An area of the opening end is different from an area of the bottom surface.