The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2020

Filed:

Oct. 10, 2018
Applicants:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Dongwoo Fine-chem Co., Ltd., Iksan-si, Jeollabuk-do, KR;

Inventors:

Jonghee Park, Yongin-si, KR;

Kitae Kim, Yongin-si, KR;

Jinseock Kim, Yongin-si, KR;

Beomsoo Kim, Iksan-si, KR;

Sangtae Kim, Iksan-si, KR;

Kyungbo Shim, Iksan-si, KR;

Giyong Nam, Iksan-si, KR;

Youngjin Yoon, Iksan-si, KR;

Daesung Lim, Iksan-si, KR;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); H01L 27/12 (2006.01); H01L 51/52 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); H01L 27/1259 (2013.01); H01L 51/0017 (2013.01); H01L 51/0023 (2013.01); H01L 51/5218 (2013.01); H01L 51/5234 (2013.01); H01L 51/56 (2013.01); H01L 27/3258 (2013.01); H01L 27/3276 (2013.01); H01L 51/5215 (2013.01); H01L 51/5253 (2013.01);
Abstract

An etchant includes: based on a total weight of the etchant, about 1 wt % to about 15 wt % of sulfurized peroxide, about 5 wt % to about 10 wt % of nitric acid, about 20 wt % to about 40 wt % of organic acid, about 0.05 wt % to about 5 wt % of ferric nitrate, about 0.1 wt % to about 5 wt % of ionic sequestrant, and 0.1 wt % to 5 wt % of corrosion inhibitor, wherein a remaining amount is deionized water.


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