The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
May. 23, 2019
Jeol Ltd., Tokyo, JP;
Takeshi Otsuka, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
A charged particle beam apparatus acquires a scanned image by scanning a sample with a charged particle beam and detecting charged particles emitted from the sample. The charged particle beam apparatus includes: a plurality of detection units that detect charged particles emitted from the sample, and an image processing unit that generates the scanned image based on a plurality of detection signals outputted from the plurality of the detection units. The image processing unit performs a process of acquiring the plurality of the detection signals at an irradiation position of the charged particle beam; a process of extracting a maximum value and a minimum value from among signal amounts of the plurality of the acquired detection signals, and calculating a difference between the maximum value and the minimum value; a process of calculating a sum total of the signal amounts of the plurality of the detection signals; and a process of determining a pixel value of a pixel of the scanned image corresponding to the irradiation position based on a sum of a first value that is obtained based on the sum total and a second value that is obtained based on the difference.