The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2020
Filed:
Dec. 12, 2017
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Hiroshi Nomura, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/08 (2014.01); B23K 26/0622 (2014.01); B23K 26/364 (2014.01); B23K 26/18 (2006.01); B23K 26/40 (2014.01); H01L 21/78 (2006.01); B23K 103/00 (2006.01); B23K 26/073 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0853 (2013.01); B23K 26/0622 (2015.10); B23K 26/0884 (2013.01); B23K 26/18 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); H01L 21/78 (2013.01); B23K 26/0736 (2013.01); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); H01L 21/67132 (2013.01);
Abstract
A laser processing apparatus includes a cassette table for placing thereon a cassette in which a plurality of workpieces are accommodated, a carrying-out unit for carrying out the workpiece from the cassette placed on the cassette table, an X-axis direction moving unit for processing feed of a chuck table in the X-axis direction, a Y-axis direction moving unit for indexing feed of the chuck table in a Y-axis direction orthogonal to the X-axis direction, and a laser beam applying unit having a focusing unit for applying a laser beam to the workpiece held on the chuck table.