The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Oct. 16, 2018
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Xiaoqiang Zhang, Clifton Park, NY (US);

Guoxiang Ning, Clifton Park, NY (US);

Jiehui Shu, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/525 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5252 (2013.01); H01L 21/76886 (2013.01);
Abstract

The present disclosure relates to semiconductor structures and, more particularly, to an anti-fuse with self-aligned via patterning and methods of manufacture. The anti-fuse includes: a lower wiring layer composed of a plurality of lower wiring structures; at least one via structure in direct contact and misaligned with a first wiring structure of the plurality of lower wiring structures and offset from a second wiring structure of the plurality of lower wiring structures; and an upper wiring layer composed of at least one upper wiring structure in direct contact with the at least one via structure.


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